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March 1, 2007Journal of Applied Physics

A method for computing ion energy distributions for multifrequency capacitive discharges

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Authors

AWAlan WuMLM. A. LiebermanUniversity of California, BerkeleyJVJohn VerboncoeurMichigan United

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Wu et al. (2007) studied this question.

synapsesocial.com/papers/6a8932d7b6153083a5deee47https://doi.org/10.1063/1.2435975
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