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February 24, 2006Chinese Physics LettersOpen Access

Investigation of Dual Radio-Frequency Driven Sheaths and Ion Energy Distributions Bombarding an Insulating Substrate

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LWLihong WangFuzhou UniversityZDZhong-Ling DaiCentral South UniversityYWYou‐Nian WangDalian University of Foreign Languages

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Wang et al. (2006) studied this question.

synapsesocial.com/papers/6a8933675edafe343d92cd54https://doi.org/10.1088/0256-307x/23/3/040
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