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February 1, 1989Journal of Applied Physics

The energy distribution of ions bombarding electrode surfaces in rf plasma reactors

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Authors

AMArmin MetzeUniversity of MinnesotaDED. W. ErnieUniversity of MinnesotaHOH. J. OskamUniversity of Minnesota

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Metze et al. (1989) studied this question.

synapsesocial.com/papers/6a8932d8b6153083a5deee4bhttps://doi.org/10.1063/1.343002
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