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March 1, 1999Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Energy distribution of ions bombarding biased electrodes in high density plasma reactors

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Authors

EEErik A. EdelbergLam Research (Austria)APAndrew PerryVeterinary Medicines DirectorateNBNeil BenjaminCarthage College

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Edelberg et al. (1999) studied this question.

synapsesocial.com/papers/6a8933516fc170cbc2fb8ad7https://doi.org/10.1116/1.581612
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  5. 5Phase and energy distribution of ions incident on electrodes in radio-frequency discharges1987 · 12 citations