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October 24, 2003Physics of PlasmasOpen Access

Analytic model for a dual frequency capacitive discharge

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HKH. C. KimPohang University of Science and TechnologyJLJ. K. LeePohang University of Science and TechnologyJSJ. W. ShonJusung Engineering (South Korea)

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Kim et al. (2003) studied this question.

synapsesocial.com/papers/6a82fb1ef2457b8164efdcdehttps://doi.org/10.1063/1.1621000
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