Synapse
⌘+K
Synapse
PulseExploreClubsResearchersJournals
Instagram
HomeClubsExplore
July 17, 2003Journal of Physics D Applied Physics

Analytical model of a dual frequency capacitive sheath

View Full Paper
Ask AI
Bookmark
Share

Authors

JRJ. RobicheCentre National de la Recherche ScientifiquePBP C BoyleDublin City UniversityMTM. M. TurnerDublin City University

Discussion

Loading...

Member takes

Overview

Key Points

Key points are not available for this paper at this time.

Cite This Study

Robiche et al. (2003) studied this question.

synapsesocial.com/papers/6a892f1ec9c00c271ba2afaahttps://doi.org/10.1088/0022-3727/36/15/311
View Full Paper
Ask AI
Bookmark
Share

Also Consider

Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Ion energy distributions in rf sheaths; review, analysis and simulation1999 · 375 citations
  2. 2Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCC1991 · 1,360 citations
  3. 3Dual excitation reactive ion etcher for low energy plasma processing1992 · 199 citations
  4. 4Analytical solution for capacitive RF sheath1988 · 555 citations
  5. 5Comparison of a consistent theory of radio frequency sheaths with step models1998 · 50 citations