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April 29, 2004Journal of Physics D Applied PhysicsOpen Access

Modelling of the dual frequency capacitive sheath in the intermediate pressure range

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Authors

PBP C BoyleDublin City UniversityJRJ. RobicheCentre National de la Recherche ScientifiqueMTM. M. TurnerDublin City University

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Boyle et al. (2004) studied this question.

synapsesocial.com/papers/6a892f1ec9c00c271ba2afa7https://doi.org/10.1088/0022-3727/37/10/006
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