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April 18, 2018Applied Physics Express

Fast semi-analytical method for precise prediction of ion energy distribution functions and sheath electric field in multi-frequency capacitively coupled plasmas

Wencong Chen Xi Zhang Dongfeng Diao

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Abstract

Fast semi-analytical method for precise prediction of ion energy distribution functions and sheath electric field in multi-frequency capacitively coupled plasmas, Chen, Wencong, Zhang, Xi, Diao, Dongfeng

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Cite This Study

Chen et al. (2018) studied this question.

synapsesocial.com/papers/6a8932f4b1e5d05ea8ec6080 https://doi.org/10.7567/apex.11.056201

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