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October 1, 2007IEEE Transactions on Plasma Science

Experimental and Theoretical Study of Ion Energy Distribution Function in Single and Dual Frequency RF Discharges

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ТРТ. В. РахимоваLomonosov Moscow State UniversityOBO.V. BraginskyLomonosov Moscow State UniversityVIVladimir V. IvanovUniversity of Pisa

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Рахимова et al. (2007) studied this question.

synapsesocial.com/papers/6a8933675edafe343d92cd53https://doi.org/10.1109/tps.2007.905201
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