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August 12, 2008Physical Review E

Ion energy distribution function in dual-frequency rf capacitively coupled discharges: Analytical model

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MOM. A. OlevanovInterScience (United States)ОПО. В. ПрошинаLomonosov Moscow State UniversityТРТ. В. РахимоваLomonosov Moscow State University

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Olevanov et al. (2008) studied this question.

synapsesocial.com/papers/6a8933516fc170cbc2fb8acfhttps://doi.org/10.1103/physreve.78.026404
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