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February 1, 1996Semiconductor Science and Technology

Micro-Raman spectroscopy to study local mechanical stress in silicon integrated circuits

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IWIngrid De WolfIMEC

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Ingrid De Wolf (1996) studied this question.

synapsesocial.com/papers/6a893fde5edafe343d92d194https://doi.org/10.1088/0268-1242/11/2/001
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