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April 1, 1981Journal of The Electrochemical SocietyOpen Access

Localized GaAs Etching with Acidic Hydrogen Peroxide Solutions

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DSDon W. ShawGeneral Electric (United States)

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Cite This Study

Don W. Shaw (1981) studied this question.

synapsesocial.com/papers/6a8969eee2cdaa7909621fc5 https://doi.org/10.1149/1.2127524

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