The nucleation and preferential orientation of Lead Zirconate-Titanate (PZT) films deposited by sol-gel spin-coating on Pt bottom electrodes is discussed. The crucial role of the Ti adhesion layer is highlighted. A qualitative crystallization model is presented which can explain the nucleation behavior of PZT-films with different Zr/Ti-ratios on different electrode structures as well as the preferential orientation of the PZT-film.
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Willems et al. (1997) studied this question.
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