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February 1, 1983Applied Physics Letters

High quality polysilicon by amorphous low pressure chemical vapor deposition

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Authors

GHG. HarbekeLKL. KrausbauerESE. F. Steigmeier

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Harbeke et al. (1983) studied this question.

synapsesocial.com/papers/6a897a75abe412682d92e80dhttps://doi.org/10.1063/1.93904
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