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April 1, 1989Journal of The Electrochemical Society

An Industrial Single‐Slice Si‐MBE Apparatus

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Authors

EKE. KasperStuttgart Technical University of Applied SciencesHKH. KibbelDaimler (United Kingdom)FSF. SchäfflerJohannes Kepler University of Linz

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Cite This Study

Kasper et al. (1989) studied this question.

synapsesocial.com/papers/6a8a5f812a1069eaeccbf36fhttps://doi.org/10.1149/1.2096810
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