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This article theoretically investigates the impact of charges at the ferroelectric/interlayer interface on the depolarization field of ferroelectric FET (FeFET) with metal/ferroelectric/interlayer/Si gate structure. The interfacial charges include fixed charges and trapped/detrapped charges. We find that the positive or negative interfacial charges (~1013cm-2) can align the directions of the depolarization field and corresponding polarization in the ferroelectric. This article may provide insight into the device design of FeFET.
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Wang et al. (2020) studied this question.
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