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July 15, 1985Applied Physics Letters

New model of the rapid initial oxidation of silicon

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Authors

SSS. A. SchaferUniversitätsklinik für StrahlentherapieSLS. A. LyonPrinceton University

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Schafer et al. (1985) studied this question.

synapsesocial.com/papers/6a8ab7dbe7982ec3bdde9378https://doi.org/10.1063/1.96246
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