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March 1, 1983Applied Physics Letters

Observation of oxidation-enhanced and oxidation-retarded diffusion of antimony in silicon

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TTT. Y. TanDuke UniversityBGB.J. GinsbergIBM Research - Thomas J. Watson Research Center

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Tan et al. (1983) studied this question.

synapsesocial.com/papers/6a8af87fc716e89f35decc4chttps://doi.org/10.1063/1.93966
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  1. 1Anomalous temperature effect of oxidation stacking faults in silicon1975 · 138 citations
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