Spectroscopic analysis reveals ionic reaction dynamics in sputtering plasmas, indicating that gas-phase oxide formation drives high-temperature superconducting film growth.
Optical spectroscopic studies of the plasma generated by inverted cylindrical magnetron sputtering of the high-temperature superconductor YBa2Cu3O7−x reveal strong ionic emissions from cation elements as well as from the sputter gases. The emissions of cationic ions are weakened drastically when O2 is added into the sputter gas indicating the dominating role of ions in the reaction with oxygen to form gas phase oxides. The formation of gas phase oxides is proposed to be an important precursor step for the in situ deposition of YBa2Cu3O7−x thin films.
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Xi et al. (1990) studied this question.
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