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February 15, 1983Applied Physics Letters

Pulsed UV laser Raman spectroscopy of silane in a linear-flow chemical vapor deposition reactor

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Authors

WBW.G. BreilandMKMark J. Kushner

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Breiland et al. (1983) studied this question.

synapsesocial.com/papers/6a8bea6f2ff0ab4f91e95f0fhttps://doi.org/10.1063/1.93919
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  5. 5Experimental Investigation of the Gas Phase in a Chemical Vapor Deposition Reaction: Application to the Silane‐Ammonia Reaction Leading to Silicon Nitride Deposits1978 · 18 citations