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December 1, 1980IEEE Transactions on Electron Devices

On-line capacitance—Voltage doping profile measurement of low-dose ion implants

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BGBarbara GordonBAE Systems (United Kingdom)

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Barbara Gordon (1980) studied this question.

synapsesocial.com/papers/6a903fee85f80aee81dd7ae4https://doi.org/10.1109/t-ed.1980.20263
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