Temperature dependence of latch-up phenomena in scaled CMOS structures

In this paper the temperature dependence of latch-up in a VLSI CMOS technology is studied. Both steady-state and pulse-induced dynamic trigger characteristics are presented showing a marked increase in latch-up resistance with decreasing temperature; in particular, a latch-up free condition is met for several structures at temperatures ranging between 100 and 200 K. The results of measurements of parasitic bipolar parameters and shunting resistances at different temperatures are reported, and their values are related to latch-up characteristics.