Low emitter resistance GaAs based HBT's without InGaAs caps

Low emitter resistance is demonstrated for AlGaAs/GaAs heterojunction bipolar transistors using Pd/Ge contacts on a GaAs contact layer. The contact resistivity to 2-10×10/sup 18/ cm/sup -3/ n-type GaAs is 4-1×10/sup -7/ /spl Omega/-cm2. These are comparable to contact resistivities obtained with non-alloyed contacts on InGaAs layers. The non-spiking Pd/Ge contact demonstrates thermal stability and area independent resistivity suitable for scaled devices. The substitution of Pd/Ge for AuGe/Ni GaAs emitter and collector contacts reduced by an order of magnitude the emitter-base offset voltage at high current densities and increased fTby more than 15% with significantly improved uniformity for devices with 2 and 2.6 μm wide emitters having lengths two, four and six times the width.