Site-Selective Deposition of Anatase TiO2 in an Aqueous Solution Using a Seed Layer

We have developed a novel method for site-selective deposition (SSD) of thin films using a seed layer. The deposition process of anatase TiO 2 from an aqueous solution was evaluated in detail using a quartz crystal microbalance, and it was found that the nucleation and initial growth of anatase TiO 2 were accelerated on amorphous TiO 2 thin films compared with silanol, amino, phenyl, or octadecyl groups. Amorphous TiO 2 thin films were deposited on silanol regions of a patterned octadecyltrichlorosilane self-assembled monolayer from a titanium dichloride diethoxide solution. This substrate was immersed in an aqueous solution containing Ti precursor to be used as a template for SSD. Anatase TiO 2 was selectively deposited on amorphous TiO 2 regions to form thin films. Consequently, a micropattern of anatase TiO 2 thin film which had high feature edge acuity was successfully fabricated in an aqueous solution.