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March 1, 1985Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena

Summary Abstract: Fabrication of ultrathin heterostructures with van der Waals epitaxy

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Authors

AKA. KomaThe University of TokyoKSK. SunouchiToshiba (South Korea)TMT. MiyajimaFujitsu (Japan)

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Koma et al. (1985) studied this question.

synapsesocial.com/papers/6a9156749ea92d4f71f07980https://doi.org/10.1116/1.583125
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