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January 1, 1973Journal of The Electrochemical SocietyOpen Access

Electrical Characteristics of MOS Structures on and Oriented N-Type Silicon as Influenced by Use of Hydrogen Chloride during Thermal Oxidation

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Authors

GBG. BaccaraniUniversity of BolognaMSM. SeveriUniversity of PisaGSG. SonciniUniversity of Trento

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Baccarani et al. (1973) studied this question.

synapsesocial.com/papers/6a916af5bd296d8bc5120b5ahttps://doi.org/10.1149/1.2403278
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