On the model of the electron sputtering process of alkali halides

A model of electron induced sputtering of alkali halides is described. It is assumed that fast neutral particles are emitted when H-centres, taking part in the focused replacement sequence, cross the surface. When the focused replacement sequence is terminated at a certain distance from the surface, the H-centre may diffuse to the surface, giving rise to thermal particles. The model allows calculations of the sputtering yields for thermal, non-thermal and molecular emission. The results of the calculations are in good agreement with the experimental data obtained by different authors.