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October 23, 2015Advanced Functional Materials

High‐Performance, Air‐Stable, Top‐Gate, p‐Channel WSe2 Field‐Effect Transistor with Fluoropolymer Buffer Layer

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Authors

SSSeyed Hossein Hosseini ShokouhTieto (Finland)PJPyo Jin JeonYonsei UniversityAPAtiye PezeshkiInstitut National de la Recherche Scientifique

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Implication

Experimental study demonstrates high hole mobility and air stability in top-gate p-channel WSe2 transistors using a fluoropolymer buffer, highlighting pathways for 2D electronic integration.

Key Points

  • Develop high-performance, air-stable top-gate p-channel WSe2 field-effect transistors by introducing a protective fluoropolymer buffer layer beneath a high-k gate oxide.
  • Deposited a thin fluoropolymer (Cytop) buffer layer to shield 2D p-channel WSe2 flakes from degradation during high-k Al2O3 gate oxide deposition.
  • Fabricated top-gate-patterned WSe2 field-effect transistors on glass substrates.
  • Tested electrical parameters and evaluated ambient air stability at 45% relative humidity over a 7-day period.
  • Achieved a high hole mobility of 100 cm² V⁻¹ s⁻¹ and an ION/IOFF ratio exceeding 10⁷ at a gate voltage of approximately −4 V and a drain voltage of −1 V.
  • Maintained robust device stability in ambient air with 45% relative humidity for 7 days post-fabrication.

Cite This Study

Shokouh et al. (2015) studied this question.

synapsesocial.com/papers/6a91908302254b6155dd56fehttps://doi.org/10.1002/adfm.201502008
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