Parallel signal injection into CCD's by means of an integrated optical channel waveguide array is demonstrated. A device in which 20 channel waveguides are coupled to a 4-phase CCD having two-level polysilicon electrodes is successfully operated. CCD transfer inefficiency is 1.0 × 10-4. Experimental results illustrating array uniformity are presented.
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Chen et al. (1978) studied this question.
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