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MOS capacitance measurements showed that the Si-Ta2O5interface prepared by thermal oxidation at ∼530°C of vacuum deposited Ta film followed by a heat treatment at 350°C in N2-H2is characterized by a negative "oxide" charge (6 × 1011e/cm-2at flat-band) and by an interface state density of ∼ 1 × 1012cm-2(eV)-1. The room temperature instability is small. The breakdown strength is >8 × 106V/cm.
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Revesz et al. (1976) studied this question.
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