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In our search for a simple equation of use to technologists, an empirical model has been developed based on the calculation of a unique planarization constant specific to the polymer solution. The model enables calculation of the degree of planarization (DOP) over isolated lines as well as over periodic lines, and is observed to fit experimental data for various polymer solutions, with varying film thicknesses and over various sizes of isolated and periodic features.
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A. Schiltz (1995) studied this question.
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