Development of a Versatile Atomic Force Microscope within a Scanning Electron Microscope

We have developed a new versatile scanning electron microscope (SEM)-atomic force microscope (AFM) system capable of simultaneous SEM and AFM operation. The system consists of a SEM and a detachable AFM module that can be taken outside of the SEM chamber. By keeping the height of AFM module to less than 36 mm, and the AFM tip 5 mm below the highest point of the AFM module, clear SEM image and variable viewing angle are achieved. The AFM utilizes the conventional optical lever method. The sample stage of the AFM module is equipped with remote controlled piezoelectric actuators enabling three degree-of-freedom positioning with sub-nanometer resolution and millimeter range. The optical lever path can also be modified by remote control after the module is placed within the SEM. The SEM-AFM system can also be used as a tool for micro scale processing and manipulation by replacing the cantilever with a designated probe.