A Monte Carlo calculation of dose deposition in a layered Si-SiO2-Si structure is described. Results are given for dose distributions for 250-, 500-, and 5000-Å SiO2 thicknesses and for irradiation by 8-keV x rays and 60Co gamma rays. Spatial distributions of holes in the 500-Å SiO2 layer are presented.
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R. N. Hamm (1986) studied this question.
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