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Nonequilibrium effects associated with spatial and temporal nonlocality between electron energy distribution and electromagnetic field in gas discharge plasmas at low gas pressures are reviewed in this paper. Formation of nonequilibrium EEDF is discussed for capacitive and inductive radio-frequency discharges. The possibility of electron temperature control is considered for gas discharge plasmas at nonequilibrium condition
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Valery Godyak (2006) studied this question.
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