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March 1, 1985Applied Physics Letters

Silicon interstitial generation by argon implantation

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Authors

GBG. BronnerRambus (United States)JPJ.D. PlummerDefence Science and Technology Laboratory

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Bronner et al. (1985) studied this question.

synapsesocial.com/papers/6a950b815f3b0bfa3be620a2https://doi.org/10.1063/1.95575
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