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April 15, 1984Applied Physics Letters

Supersaturation of self-interstitials and undersaturation of vacancies during phosphorus diffusion in silicon

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Authors

PFP. FaheyBaylor College of MedicineRDR.W. DuttonHEC MontréalSHS. M. HuSichuan University

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Cite This Study

Fahey et al. (1984) studied this question.

synapsesocial.com/papers/6a897a415246293882fd481dhttps://doi.org/10.1063/1.94915
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