Robust Adaptive Control of Piezoelectric Actuators With an Application to Intracytoplasmic Sperm Injection

This paper describes a robust adaptive control method for positioning piezoelectric actuators (ultrasonic motor) to achieve highly precise motion. The model employed to describe the motor is a second-order linear model plus a nonlinear part comprising predominantly of a dynamical hysteresis. Based on the model, the overall control algorithm uses a PID component and an adaptive robust component for estimating the parameters of the piezo motor model. The adaptive component is continuously refined based on just prevailing input and output signals. Real-time experimental results are provided to verify the effectiveness of the proposed scheme when applied to high precision motion trajectory tracking such as Intracytoplasmic Sperm Injection (ICSI).