Miniaturization of a V-Shape Transducer Ultrasonic Motor

The miniaturization of a V-shaped transducer ultrasonic motor (VSM) was carried out. The head block design and nut length were optimized to match resonance frequencies without coupling asymmetric and spurious vibrations. The volume of the new miniaturized VSM was 58% of that of the original VSM. The speed, thrust, and resolution of the new VSM compared favorably with those of the original VSM. A massive ceramics linear stage was driven by the new VSM working in the sole-use VSM feedback control system. For a traveling distance of 20 mm, the stage motion was controlled to remain in the target position plus or minus 1 nm within 350 ms.