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May 1, 1986Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Diagnostics of microwave plasma by laser induced fluorescence

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Authors

KNKen NinomiyaKeio UniversityKSKeizô SuzukiSapporo Medical UniversitySNShigeru NishimatsuHitachi (Japan)

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Ninomiya et al. (1986) studied this question.

synapsesocial.com/papers/6a957720c163d75667fa8edehttps://doi.org/10.1116/1.573939
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