Video-rate optical low-coherence reflectometry based on a linear smart detector array

A low-coherence reflectometer based on a conventional Michelson interferometer and a novel silicon detector chip that allows parallel heterodyne detection is presented. Cross-sectional images of 64x256 pixels covering an area of 1.92 mm x 1.3 mm are acquired at video rate and with a sensitivity close to the shot-noise limit. Applications in surface profiling and thickness measurement are demonstrated.