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December 1, 1979Applied Physics Letters

High current density Ga+ implantations into Si

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Authors

RHR. R. HartHRL Laboratories (United States)CAC. L. AndersonMichigan Technological UniversityHDH. L. DunlapHRL Laboratories (United States)

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Hart et al. (1979) studied this question.

synapsesocial.com/papers/6a95b3d3fff8a7d415a4f9fbhttps://doi.org/10.1063/1.90986
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