Uniform Growth of AlGaN/GaN High Electron Mobility Transistors on 200 mm Silicon (111) Substrate

Uniform Growth of AlGaN/GaN High Electron Mobility Transistors on 200 mm Silicon (111) Substrate, Christy, Dennis, Egawa, Takashi, Yano, Yoshiki, Tokunaga, Hiroki, Shimamura, Hayato, Yamaoka, Yuya, Ubukata, Akinori, Tabuchi, Toshiya, Matsumoto, Koh