Differential pressure sensor using a piezoresistive cantilever

This paper reports on a differential pressure sensor using a piezoresistive cantilever with the dimensions of 125 µm × 100 µm × 0.3 µm. The sensor has a higher sensitivity than a traditional diaphragm sensor because of the three free edges of the cantilever. The measured results indicated that the fabricated cantilever bent according to theory when differential pressure was applied. The sensitivity and resolution of the differential pressure were 3.2 × 10 −4 Pa −1 and 0.02 Pa from −20 Pa to 20 Pa, respectively.