Distribution of polymer deposition in glow discharge polymerization in a capacitively coupled system

The manner by which polymers created by plasma uniformly deposit onto substrates was sought. By rotating the substrate placed midway between electrodes, completely uniform distribution of polymer deposition was accomplished, and the deviation of the polymer deposition in a radius direction of the rotating substrate was within experimental errors. Materials of the substrate on which the polymer deposited had no influence on uiniformity of polymer deposition, but the electrical circuit of power source, i.e., grounding an electrode, markedly disturbed the uniformity. Thickness of polymers deposited on the substrate was linearly proportional to reaction time. Surface energies of deposited polymers prepared from methane, ethylene, and acetylene by plasma were independent of reaction time and were rather higher than those for conventionally polymerized polyolefines.