Superconducting Properties of Y-Ba-Cu-O Thin Films Prepared by RF Magnetron Sputtering with a Grid Electrode

Y-Ba-Cu-O thin films were prepared by an RF sputtering method with a DC-biased grid electrode inserted between a target and a substrate. When the grid was negatively biased at about -70 V, as-sputtered superconducting films with a c-axis orientation were obtained, while the films prepared without the grid electrode but under the same condition showed neither superconductivity nor c-axis crystal orientation.