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The imaging properties of the soft-X-ray microscopes composed of a Schwarzschild objective and a grazing incidence mirror condenser are discussed. Fundamental formulae on the partially coherent transfer function, the resolution of a two-point object and the edge response have been derived by consideration of the optical properties of an object in soft-X-ray regions. Then these imaging properties for the microscopes are investigated with the formulae and compared with those for a normal circular pupil system.
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Yoshiaki Horikawa (1993) studied this question.
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