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November 1, 2011Japanese Journal of Applied Physics

Growth of Quasi-Single-Crystal Silicon–Germanium Thin Films on Glass Substrates by Continuous Wave Laser Lateral Crystallization

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KKKuninori KitaharaShimane University KHKenta Hirose JSJ. Suzuki

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Experimental study demonstrates quasi-single-crystal silicon-germanium film growth on glass via laser lateral crystallization, highlighting potential for advanced electronics on inexpensive...

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To synthesize silicon–germanium thin films on glass substrates using continuous wave laser lateral crystallization and evaluate their crystal structure and compositional distribution.
Applied continuous wave laser lateral crystallization to deposit and crystallize silicon–germanium thin films, including Si0.7Ge0.3, on glass substrates.
Characterized film morphology, crystal orientation, and germanium distribution using optical microscopy and electron microscopy.
Evaluated crystal growth behavior and elemental segregation using a constitutional undercooling theoretical model.
Alloying germanium with silicon during laser crystallization generated crystals exceeding 100 µm in length along the scan path, a dimension unattainable in pure silicon films.
Films composed of Si0.7Ge0.3 exhibited a <111> surface normal orientation dominated by electrically inactive Σ3 coincidence site lattices, with high-angle and random boundaries rarely observed.

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Kitahara et al. (2011) studied this question.

synapsesocial.com/papers/6a99a2fcec17d6fbef28f57b https://doi.org/10.7567/jjap.50.115501

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Implication

Experimental study demonstrates quasi-single-crystal silicon-germanium film growth on glass via laser lateral crystallization, highlighting potential for advanced electronics on inexpensive...

Growth of Quasi-Single-Crystal Silicon–Germanium Thin Films on Glass Substrates by Continuous Wave Laser Lateral Crystallization

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Member takes

Implication

Key Points

Cite This Study

Growth of Quasi-Single-Crystal Silicon–Germanium Thin Films on Glass Substrates by Continuous Wave Laser Lateral Crystallization

Discussion

Member takes

Implication

Key Points

Cite This Study

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