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Imprint and fatigue properties of Pb(Zr0.4Ti0.6)O3film prepared by sol-gel spin coating method in Pt/PZT/Pt capacitors are studied in this experiment. The voltage shift of hysteresis loops of Pt/PZT/Pt capacitors under DC voltage bias and fatigue stress are investigated at room temperature. It is shown that the absolute values of voltage shift of hysteresis loops decrease with the increasing positive bias voltage. Both the absolute and relative shifts of coercive voltage increase with the increase of fatigue stress. The properties above can be explained by the formation and change of oxide layer at PZT/electrode interface under fatigue stress and correlative theories and models.
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Jia et al. (2006) studied this question.
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