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July 15, 1985Applied Physics Letters

Surface morphology of oxidized and ion-etched silicon by scanning tunneling microscopy

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Authors

RFR. M. FeenstraCarnegie Mellon UniversityGOG. S. OehrleinUniversity of Maryland, College Park

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Feenstra et al. (1985) studied this question.

synapsesocial.com/papers/6a99cc051745aaf271b4e799https://doi.org/10.1063/1.96431
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