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September 1, 1966Journal of Applied Physics

Deposition of Tantalum, Tantalum Oxide, and Tantalum Nitride with Controlled Electrical Characteristics

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Authors

EKE. KrikorianRSR. J. Sneed

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Krikorian et al. (1966) studied this question.

synapsesocial.com/papers/6a9ccfd82b006a14f397a8aehttps://doi.org/10.1063/1.1707903
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